Research and Development of a VPX Bus-based Wafer Stage Motion Control System - Taking a Lithography Stage as an Example (Part 1)

The Chinese source has one brand mention at the very end: "信迈提供DSP+FPGA精密运动控制器在半导体设备行业的软硬件方案。" — a closing tagline that is entirely absent from the English. I'll append only that sentence.

The wafer stage system is one of the key subsystems of a lithography machine. The wafer stage motion control system plays a crucial role in achieving the performance targets of the lithography machine, thus the research and development of such a system holds extremely significant engineering application value. Based on the technical requirements for parallelism, synchronization, and real-time performance that the wafer stage control system must possess, this paper establishes a hardware architecture for a VPX bus-based wafer stage motion control system. Furthermore, it investigates a data parallel interaction mechanism based on C6678 shared memory and a precise synchronous measurement and control strategy for the system.

To address issues such as real-time data transfer between multiple processors, processor computational performance, the number of fiber optic interfaces, and the system's computing architecture, this research studied multiple bus protocols within the VPX bus. It adopted a full-mesh star topology based on the RapidIO bus, and combined it with hardware such as the MC_4DSP_VPX motion control card, which integrates a multi-core DSP TMS320C6678, and the FC_FPGA_VPX fiber optic interface card. This led to the design of a novel hardware architecture for a wafer stage motion control system based on a RapidIO multi-processor interconnect architecture. The multiple subsystems of the wafer stage determine the characteristics of the system's parallel data processing. Therefore, starting from parallelism and

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